We supply the following materials:
Silicon
Nitride on Silicon
Thermal Oxide
Sapphire
Quartz
Silicon on Insulator (SOI)
Fused Silica
Borofloat 33 Glass
Corning Glass
Gorilla Glass
D263 Glass
LiNbO3
LiTaO3
SrTiO3
Silicon Carbide (SiC)
Gallium Arsenide (GaAs)
Gallium Phosphide (GaP)
Gallium Antimonide (GaSb)
Indium
Indium Phosphide (InP)
Indium Arsenide (InAs)
Indium Antimonide (InSb)
Germanium
Graphene
GaN on Sapphire
Silicon on Sapphire (SoS)
ITO Glass
Magnesium Oxide (MgO)
Bismuth
Tellurium
Wafers with circuits, e.g IGBT, Thyristor and Diode Wafer, SiC MOSFETs wafers
MEMS silicon wafers with patterns and special structures
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Services we provide:
Dicing
Sputtering
Evaporation
Thermal Oxide
Nitride on Silicon
Wafer Foundry Services.
1. Lithography: SUSS-MA8; Nikon-I7/10/12; DWL-66; Elionix ELS7000;
2. Coating: EBX-1000; Denton 550; PICOSUN/SUNALETM R-200; LPCVD; Plasmalabsystem 100; Plasmalabsystem ICP380; Optorun OTFC-900;
3. Etching machine: SPTS-ICP; Oxford Plasmalab System 100 ICP180; Tegal 903E; OXFORD Ionfab 300Plus; VHF; FEL/Helios NanoLab 600i; Plasma:class-1;
4. Encapsulation: SUSS/SB6 Gen2; Disco-3350; Nilmt; TSV; NV-GSD-HE
5. Detection and Testing: SU8020; VEECO; AFM;HORIBA/LabRAM HR Ecolution; K-mac
6. Implanting, Bonding and etc.
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